PNST N2 Chamber is designed by customer request, it provide atmosphere of the oxygen purity and moisture purity below 1 ppm respectively with the possible short time by N2 purge and gas circulation between N2 Chamber and purifier system.
PNST N2 Chamber can be designed to maintain class 10 atmospheres by removing particles generated in N2 Chamber and this system is not affected to process by particles.
|Leak Rate||<0.05vol%/hr (ISO10648-2)|
|Filter||Ulfa Filtering System|
|Pipe||Hook up / ISO Inlet / Outlet|
|Sensor||Moisture / Oxygen / Pressure|
|Feedthrough Port Apply|